JPH0610686Y2 - ウエハ移し替装置 - Google Patents

ウエハ移し替装置

Info

Publication number
JPH0610686Y2
JPH0610686Y2 JP1987030967U JP3096787U JPH0610686Y2 JP H0610686 Y2 JPH0610686 Y2 JP H0610686Y2 JP 1987030967 U JP1987030967 U JP 1987030967U JP 3096787 U JP3096787 U JP 3096787U JP H0610686 Y2 JPH0610686 Y2 JP H0610686Y2
Authority
JP
Japan
Prior art keywords
carrier
boat
wafer
stage
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987030967U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63137939U (en]
Inventor
健一 木下
貴庸 浅野
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP1987030967U priority Critical patent/JPH0610686Y2/ja
Publication of JPS63137939U publication Critical patent/JPS63137939U/ja
Application granted granted Critical
Publication of JPH0610686Y2 publication Critical patent/JPH0610686Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987030967U 1987-03-03 1987-03-03 ウエハ移し替装置 Expired - Lifetime JPH0610686Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987030967U JPH0610686Y2 (ja) 1987-03-03 1987-03-03 ウエハ移し替装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987030967U JPH0610686Y2 (ja) 1987-03-03 1987-03-03 ウエハ移し替装置

Publications (2)

Publication Number Publication Date
JPS63137939U JPS63137939U (en]) 1988-09-12
JPH0610686Y2 true JPH0610686Y2 (ja) 1994-03-16

Family

ID=30836262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987030967U Expired - Lifetime JPH0610686Y2 (ja) 1987-03-03 1987-03-03 ウエハ移し替装置

Country Status (1)

Country Link
JP (1) JPH0610686Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106164635A (zh) * 2014-04-14 2016-11-23 富士胶片株式会社 应力测定方法、应力测定用构件及应力测定用装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991735U (ja) * 1982-12-10 1984-06-21 日本電気ホームエレクトロニクス株式会社 半導体ウエ−ハ移し替え装置

Also Published As

Publication number Publication date
JPS63137939U (en]) 1988-09-12

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